氣體規(guī)格雜質(zhì)含量(ppm)
He99.9999%ScottGas: SEMI C3.20-92: N2<0.5; O2<0.5; THC<0.1; CO+CO2<0.1; H2O<0.2
氦99.9999%Ar<0.2; N2<0.2; CO2<0.1; O2<0.2; Ne<0.2; THC<0.1； H2O<0.2
氦99.9995%Ar<0.5; N2<0.5; CO2<0.2; O2<0.5; Ne<1; THC<0.5;H2O<1
99.999%Ne<4; CO<0.5; H2<2; CO2<0.5; O2+Ar<1; CH4<0.5; N2<2; H2O<3
99.995%Ne<15; CO<1; H2<3; CO2<1; O2+Ar<3; CH4<1;N2<10:H2O<10
99-99.9%
Ar99.9999%N2<0.5;O2<0.2;THC<0.1;H2O<0.5;CO<0.1;CO2<0.2;H2<0.5
99.999%N2<5; H2<1; O2<2; CH4<2;H2O<4
99.99%N2<10.0;CH4<10; O2<10; H2O<20; H2<5
H299.9999%ScottGas: SEMI C3.19-93: N2<0.3; O2<0.2; THC<0.1; CO+CO2<0.1; H2O<0.5
99.9995%CO2<0.5; N2<5.0; CO<1.O; O2<1.0; THC<0.2; H2O<1.0;
99.999%
99.99%
D299.99%CO<1; O2<1; CO2<1; N2<5; N2O<0.5; CH4<1; N2O≤2
N299.9995%CO2<0.5; H2O<0.5; CO<1.0; O2<1.0; H2≤2.0; THC<0.2
99.999%O2≤3; CH4≤3; H2≤1; H2O≤5
O299.999%CO2<0.5; H2O<0.5; CO<1.0; N2<5.0; Kr<2.0; THC<0.2;
99.995%
99.9%
CO99.99% SO299.99%
99.95%99.9%
99,9%NO≥99%
CO299.995%NO299.9%
99.99%99.0%
99%-99.9%
Ne99.999%N2<3.0; CO<1.0; He<10; H2O<1.0; O2<1.0; THC<1.0; CO2<0.5
99.99N2<100; CO2<1; CH4≤1
Kr99.997%CO2<0.5; O2<2.0; CO<1.0; THC<5.0; He<3.0; H2≤2.0; CH4≤5.0; H2O<1.0; N2<5;
99.99%Xe<5; CO2<1; N2<15; CO≤1; O2+Ar≤,5; CH4≤1; H2≤2; H2O≤3
99.95%Xe<5; CO≤1; N2≤15; CO2≤1; O2+Ar≤5; CH4≤1; H2≤2; H2O≤3;
Xe99.999%ScottGas: Kr<8; N2<1; O2<0.5; CH4<0.5; CO2<0.5; H2O<0.5
99.995%N2<25; H2O<1.0; THC<1.0; CO2<5.0; Ar<5.0; CO<1.0; H2+He<5.0; Kr<50;
99.99%CO2<1; N2O<1; CO<1.0; H20<5; CH4<5;
99.95%CO2<5; N2O<5; CO<5; H2O<5; CH4<5;